A novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as structured surfaces. Thin foil laser targets for ion acceleration experiments are selected as the test subject. The approach is based on acquiring areal maps with a high-precision optical 3D profilometer and on processing topography data with novel techniques obtained by merging knowledge and algorithms from surface metrology, dimensional metrology and computer vision / image processing. The main issues related to general applicability and metrological performance of the methodology are identified and discussed.
Evaluation of critical dimensions and geometric errors of thin foil laser targets through areal surface topography analysis
SENIN, Nicola;
2012
Abstract
A novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as structured surfaces. Thin foil laser targets for ion acceleration experiments are selected as the test subject. The approach is based on acquiring areal maps with a high-precision optical 3D profilometer and on processing topography data with novel techniques obtained by merging knowledge and algorithms from surface metrology, dimensional metrology and computer vision / image processing. The main issues related to general applicability and metrological performance of the methodology are identified and discussed.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
