The influence of continuous actuation stress on the reliability of dielectric-less ohmic RF-MEMS cantilever-based switches was investigated in this work. Comparing different designs, the changing of the main electrical parameters during the stress were attributed to substrate charging phenomena, leading to both narrowing and shifting of traditional hysteresis-like curves. Recovery procedures were also analyzed.
Contact Modeling of RF MEMS Switches Based on FEM Simulations
FARINELLI, PAOLA;
2010
Abstract
The influence of continuous actuation stress on the reliability of dielectric-less ohmic RF-MEMS cantilever-based switches was investigated in this work. Comparing different designs, the changing of the main electrical parameters during the stress were attributed to substrate charging phenomena, leading to both narrowing and shifting of traditional hysteresis-like curves. Recovery procedures were also analyzed.File in questo prodotto:
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