Electromagnetic and electromechanical study of a H-shaped millimeter MEMS shunt switch

This paper presents the electromagnetic and electromechanical design of a new H-shaped millimeter RF MEMS switch for high frequency applications. The switch is a fixed-fixed metal beam placed in a shunt configuration over a coplanar waveguide transmission line. A numerical model of the switch has been developed in order to analyze the influence of its parameters on both the electromagnetic and electro-mechanical domains. Measurements of fabricated prototypes have been performed in order to compare simulated and experimental results, showing very good agreement.