In this paper the relation between contact resistivity and contact resistance is examined. The most widely used methods for contact resistance measurements and extraction of the contact resistivity are presented. Different types of approach, aimed to improve the accuracy and sensitivity of the various techniques are then extensively discussed. In each case, applications to practical contacts, mainly metal systems on heavily doped silicon, are also shown. Finally, the impact of a low contact resistivity on contact performance and reliability is mentioned.
Metal/Semiconductor Contact Resistivity and its Determination from Contact Resistance Measurements
SCORZONI, Andrea;
1988
Abstract
In this paper the relation between contact resistivity and contact resistance is examined. The most widely used methods for contact resistance measurements and extraction of the contact resistivity are presented. Different types of approach, aimed to improve the accuracy and sensitivity of the various techniques are then extensively discussed. In each case, applications to practical contacts, mainly metal systems on heavily doped silicon, are also shown. Finally, the impact of a low contact resistivity on contact performance and reliability is mentioned.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
