This paper presents a new methodology to accurately manage the temperature of microheaters manufactured on glass, based on an analog control circuit built around a single operational amplifier. The first step is an accurate electro-thermal characterization of the microheater, using a 4-terminal topology, in order to extract i) the microheater active area temperature as a function of both heating power and 2-wire electrical resistance and ii) the thermal resistances and capacitances of a thermal model. Then experimental measurements are shown and compared with simulations obtained using PSpice modelling.
Accurate Analog Temperature Control of a Thin Film Microheater on Glass Substrate for Lab-on-Chip Applications
SCORZONI, Andrea;TAVERNELLI, MICHELE;PLACIDI, Pisana;VALIGI, Paolo;
2014
Abstract
This paper presents a new methodology to accurately manage the temperature of microheaters manufactured on glass, based on an analog control circuit built around a single operational amplifier. The first step is an accurate electro-thermal characterization of the microheater, using a 4-terminal topology, in order to extract i) the microheater active area temperature as a function of both heating power and 2-wire electrical resistance and ii) the thermal resistances and capacitances of a thermal model. Then experimental measurements are shown and compared with simulations obtained using PSpice modelling.File in questo prodotto:
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