This paper presents a new concept for the fine tuning of high-Q bandpass filters to compensate for small response deviations due to manufacturing tolerances and temperature variations. Discrete frequency tuning steps are obtained using a rectangular waveguide resonator loaded with a reconfigurable E-plane circuit. Ohmic micro electromechanical systems (MEMS) switches can be placed along thin E-plane metal strips so as to modify the E-field distribution of the TE101 resonant mode, thus the central frequency of the filter. As an example, 0.1% frequency steps can easily be obtained in a 10 GHz resonant cavity. The use of low-loss substrates ensures high-quality factors of the order of 1000. The feasibility of the proposed approach is demonstrated both by full-wave simulations and by fabricating and measuring an X-band hardwired prototype. © 2014 Cambridge University Press and the European Microwave Association.

MEMS-based fine tuning of high Q-factor E-plane filters

SORRENTINO, Roberto
2014

Abstract

This paper presents a new concept for the fine tuning of high-Q bandpass filters to compensate for small response deviations due to manufacturing tolerances and temperature variations. Discrete frequency tuning steps are obtained using a rectangular waveguide resonator loaded with a reconfigurable E-plane circuit. Ohmic micro electromechanical systems (MEMS) switches can be placed along thin E-plane metal strips so as to modify the E-field distribution of the TE101 resonant mode, thus the central frequency of the filter. As an example, 0.1% frequency steps can easily be obtained in a 10 GHz resonant cavity. The use of low-loss substrates ensures high-quality factors of the order of 1000. The feasibility of the proposed approach is demonstrated both by full-wave simulations and by fabricating and measuring an X-band hardwired prototype. © 2014 Cambridge University Press and the European Microwave Association.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11391/1331317
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