The sensitivity and selectivity of micromachined gas sensors strongly depend on the temperature of the heating element; therefore an accurate determination of this temperature is required. In this paper, a simple analytical model of the thermal behavior of a heating element placed onto a thermally insulated dielectric membrane is presented. It is demonstrated that simple resistance vs. power measurements are sufficient for a precise determination of the sensor temperature. These measurements performed “once and for all” at the wafer-level on the statistically relevant number of heaters, allowed us to determine a “universal” temperature vs. power curve.

Accurate extraction of the temperature of the heating element in macromachined gas sensors

PLACIDI, Pisana;SCORZONI, Andrea;
2001

Abstract

The sensitivity and selectivity of micromachined gas sensors strongly depend on the temperature of the heating element; therefore an accurate determination of this temperature is required. In this paper, a simple analytical model of the thermal behavior of a heating element placed onto a thermally insulated dielectric membrane is presented. It is demonstrated that simple resistance vs. power measurements are sufficient for a precise determination of the sensor temperature. These measurements performed “once and for all” at the wafer-level on the statistically relevant number of heaters, allowed us to determine a “universal” temperature vs. power curve.
2001
9780780366855
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11391/144301
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 6
  • ???jsp.display-item.citation.isi??? ND
social impact