This paper describes a predictive and complete numeric model of a multi-mass and impact-coupled MEMS electrostatic kinetic energy harvester (e-KEH). A silicon resonator is coupled with elastic silicon beams (acting as a part of stoppers) and a miniature metallic ball. The model considers all these impacts as well as the electromechanical force and catches the frequency-up and spring-softening effects. More importantly, for the first time, it models accurately the evolving and non-linear squeeze-film air damping effect in a gap-closing transducer, which is induced by the large amplitude of displacement of the silicon mass. The predictions provided by the model are compared with experimental results, showing a good consistency. The key parameters of the KEH are analyzed with the proposed model, which can be of great help for further design optimization of similar devices.
An impact-coupled MEMS electrostatic kinetic energy harvester and its predictive model taking nonlinear air damping effect into account
Cottone F.;Basset P.
2018
Abstract
This paper describes a predictive and complete numeric model of a multi-mass and impact-coupled MEMS electrostatic kinetic energy harvester (e-KEH). A silicon resonator is coupled with elastic silicon beams (acting as a part of stoppers) and a miniature metallic ball. The model considers all these impacts as well as the electromechanical force and catches the frequency-up and spring-softening effects. More importantly, for the first time, it models accurately the evolving and non-linear squeeze-film air damping effect in a gap-closing transducer, which is induced by the large amplitude of displacement of the silicon mass. The predictions provided by the model are compared with experimental results, showing a good consistency. The key parameters of the KEH are analyzed with the proposed model, which can be of great help for further design optimization of similar devices.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
