In this paper, a simple analytical model of the steady -state thermal behavior of a Pt microheater for micromachined gas sensors is presented. It is demonstrated that simple resistance vs. power measurements, coupled with a suitable thermal model, are sufficient for a precise determination of the sensor temperature.
Accurate Analytical Thermal Model of the Heating Element in Micromachined Gas Sensors
PLACIDI, Pisana;SCORZONI, Andrea;
2002
Abstract
In this paper, a simple analytical model of the steady -state thermal behavior of a Pt microheater for micromachined gas sensors is presented. It is demonstrated that simple resistance vs. power measurements, coupled with a suitable thermal model, are sufficient for a precise determination of the sensor temperature.File in questo prodotto:
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