Microwave phase shifters are basic components used in a large variety of communication and radar systems, microwave instrumentation, and industrial applications. As commercial and military systems increasingly move towards smaller and high performance antenna systems, MEMS technology can be applied to develop electronically reprogrammable phase shifters with low-power consumption, low loss, and excellent linearity. This paper presents the design of a compact 5-bit K-band MEMS phase shifter to be used in reconfigurable telecommunication systems. The phase shifter is being manufactured on high resistivity silicon substrate by using the well-established FBK MEMS process. The electro-magnetic design of the 5-bit phase shifter is presented in Section 2. A very low cost plastic package has been also developed and it is shown in Section 3.
A 5-bit K-Band MEMS phase shifter in a 1-level plastic package
BASTIOLI, SIMONE;FARINELLI, PAOLA;OCERA, ALESSANDRO;SORRENTINO, Roberto;
2008
Abstract
Microwave phase shifters are basic components used in a large variety of communication and radar systems, microwave instrumentation, and industrial applications. As commercial and military systems increasingly move towards smaller and high performance antenna systems, MEMS technology can be applied to develop electronically reprogrammable phase shifters with low-power consumption, low loss, and excellent linearity. This paper presents the design of a compact 5-bit K-band MEMS phase shifter to be used in reconfigurable telecommunication systems. The phase shifter is being manufactured on high resistivity silicon substrate by using the well-established FBK MEMS process. The electro-magnetic design of the 5-bit phase shifter is presented in Section 2. A very low cost plastic package has been also developed and it is shown in Section 3.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
