RF MEMS series and shunt switches in coplanar waveguide configuration have been tested to check their reliability in terms of the technological yield, the number of cycles and the total time during which they are actuated. Cycles up to 5e8 and total actuation times of 5e5 s have been measured for series configurations by using short pulses. More than one week of operation has been experienced on a shunt device. Power handling has been also considered, and purposely designed switches were able to handle powers up to 5 Watt
Reliability and Power Handling Issues in Ohmic Series and Shunt Capacitive RF MEMS Switches
FARINELLI, PAOLA;MEZZANOTTE, Paolo;SORRENTINO, Roberto;
2007
Abstract
RF MEMS series and shunt switches in coplanar waveguide configuration have been tested to check their reliability in terms of the technological yield, the number of cycles and the total time during which they are actuated. Cycles up to 5e8 and total actuation times of 5e5 s have been measured for series configurations by using short pulses. More than one week of operation has been experienced on a shunt device. Power handling has been also considered, and purposely designed switches were able to handle powers up to 5 WattFile in questo prodotto:
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