In recent years increasing attention has been devoted to microelectromechanical systems (MEMS) for a number of electronic applications. In this paper we focus our attention to microelectromechanical switches. Originally proposed by Petersen in 1979 [11] MEMS technology is presently on the verge of revolutionizing RF and microwaves applications. The increasing market demand for more functional devices has generated the need of a more flexible and easy realization process, where low cost, weight and size are the most important requirements. The realization of electrostatics switches on alumina substrates is demonstrated in this work. The theoretical characterization based on the electrostatic 1D model is compared with experimental data.
Manufacturing and Characterization of RF-MEMS Switches Built on Alumina by Using Standard Multilayer Thin Film Equipment
FARINELLI, PAOLA;SORRENTINO, Roberto
2005
Abstract
In recent years increasing attention has been devoted to microelectromechanical systems (MEMS) for a number of electronic applications. In this paper we focus our attention to microelectromechanical switches. Originally proposed by Petersen in 1979 [11] MEMS technology is presently on the verge of revolutionizing RF and microwaves applications. The increasing market demand for more functional devices has generated the need of a more flexible and easy realization process, where low cost, weight and size are the most important requirements. The realization of electrostatics switches on alumina substrates is demonstrated in this work. The theoretical characterization based on the electrostatic 1D model is compared with experimental data.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
