In the last years a lot of work has been done on RF-MEMS switches by several research teams. Thales Alenia Space Italia (TAS-I) started, in the year 2000, its first MEMS project just on RF-switches, as prime contractor of the ESA/ESTEC program "Microwave Electrostatic Micro-Machined Devices for On-Board Applications". In this project the RF-MEMS switches were realized on silicon wafers (the process has been set-up in the Microfabrication Lab of ITC-IRST located in Trento-Italy) and reached the required electrical performance. MEMS switches are very sensitive to humidity and contaminants like gases, organic compounds, etc. and therefore they must be packaged using hermetic seals and in nitrogen or vacuum environments.
Manufacturing of RF MEMS switches on LTCC for space applications
FARINELLI, PAOLA;
2008
Abstract
In the last years a lot of work has been done on RF-MEMS switches by several research teams. Thales Alenia Space Italia (TAS-I) started, in the year 2000, its first MEMS project just on RF-switches, as prime contractor of the ESA/ESTEC program "Microwave Electrostatic Micro-Machined Devices for On-Board Applications". In this project the RF-MEMS switches were realized on silicon wafers (the process has been set-up in the Microfabrication Lab of ITC-IRST located in Trento-Italy) and reached the required electrical performance. MEMS switches are very sensitive to humidity and contaminants like gases, organic compounds, etc. and therefore they must be packaged using hermetic seals and in nitrogen or vacuum environments.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
