This paper presents an innovative concept for the design of MEMS-reconfigurable bandpass filters with very high Q-factor. MEMS switches are arranged at one or both sides of a TE101 mode cavity so as to provide an equivalent reconfigurable inner waveguide wall. The effective width of the cavity can be changed by activating the MEMS switches, so as to control the cavity resonant frequency. The proposed method yields higher Q factors with respect to other approaches involving ridged or conductor-loaded cavities. Preliminary measurements of a 10 GHz 4th order bandpass filter show a 400 MHz frequency shift with a Q-factor above 900.
High-Q Reconfigurable Waveguide Filters using Cantilever MEMS Switches
FARINELLI, PAOLA;SORRENTINO, Roberto
2010
Abstract
This paper presents an innovative concept for the design of MEMS-reconfigurable bandpass filters with very high Q-factor. MEMS switches are arranged at one or both sides of a TE101 mode cavity so as to provide an equivalent reconfigurable inner waveguide wall. The effective width of the cavity can be changed by activating the MEMS switches, so as to control the cavity resonant frequency. The proposed method yields higher Q factors with respect to other approaches involving ridged or conductor-loaded cavities. Preliminary measurements of a 10 GHz 4th order bandpass filter show a 400 MHz frequency shift with a Q-factor above 900.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
