Two different topologies of RF MEMS series ohmic switches (cantilever and clamped - clamped beams) in Coplanar Waveguide (CPW) configuration have been characterized by means of DC, environmental and RF measurements. The devices have been manufactured on High Resistivity (HR) Silicon substrates, as building blocks to be implemented in different Single-Pole 4-Throw (SP4T), Double-Pole Double-Throw (DPDT) configurations and then integrated in LTCC technology for the realization of Large Order Clos 3D networks
RF MEMS ohmic switches for matrix configurations
FARINELLI, PAOLA;
2010
Abstract
Two different topologies of RF MEMS series ohmic switches (cantilever and clamped - clamped beams) in Coplanar Waveguide (CPW) configuration have been characterized by means of DC, environmental and RF measurements. The devices have been manufactured on High Resistivity (HR) Silicon substrates, as building blocks to be implemented in different Single-Pole 4-Throw (SP4T), Double-Pole Double-Throw (DPDT) configurations and then integrated in LTCC technology for the realization of Large Order Clos 3D networksFile in questo prodotto:
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