Automatic Design and 3D Electromagnetic Simulation of Sub-nH Spiral Inductors

The design of modern radiofrequency integrated circuits on silicon operating at millimeter-waves typically requires the integration of several spiral inductors. At such high frequencies, a typical design requires inductors with sub-nH values, which are traditionally not available in the design-kits of the technology processes. In this work, we present a tool based on VbScripts that automatically executes three-dimensional layout editing and electromagnetic simulating commands. In detail, it draws the inductor masks for the specific microelectronic process, including vias and underpasses, in less than one minute, and then performs the electromagnetic simulations. The outputs are the exportable DRC-errors free layout (GDS-II format) and the 2π-model parameters to be included in the schematic editor. This tool allows significant design automation compatible with traditional commercial CAD tools.