Electromigration (EM) is one of the major concerns for the development of ULSI divices, but not all the aspects of the phenomenon are presently well understood. In this paper well established results and unsolved problems are reviewed and discussed. First, the physical model and in particular the influence of the mechanical stress on EM is considered. Then, the various techniques used to characterize electromigration are analyzed, making distinction between traditional techniques (median time to failure technique and resistometric methods) and more recently developed methods (high-resolution resistometric techniques and low-frequency noise measurement), also considering the fast techniques used for metallisation testing in the industrial environment. Finally, a section is devoted to the problem of test-structure and test-procedure standardisation in EM experiments.
Electromigration in thin-films for microelectronics
SCORZONI, Andrea;
1993
Abstract
Electromigration (EM) is one of the major concerns for the development of ULSI divices, but not all the aspects of the phenomenon are presently well understood. In this paper well established results and unsolved problems are reviewed and discussed. First, the physical model and in particular the influence of the mechanical stress on EM is considered. Then, the various techniques used to characterize electromigration are analyzed, making distinction between traditional techniques (median time to failure technique and resistometric methods) and more recently developed methods (high-resolution resistometric techniques and low-frequency noise measurement), also considering the fast techniques used for metallisation testing in the industrial environment. Finally, a section is devoted to the problem of test-structure and test-procedure standardisation in EM experiments.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
