A novel structure, named Circular Resistor, is proposed for extracting metal/semiconductor contact resistivity. A two-dimensional analytical solution of the system is shown in a simplified case; the complete solution is calculated by numerical simulations. Very good agreement between the analytical model and the numerical simulations was found. Regarding resolution, the Circular Resistor exhibits characteristics similar to other standard structures, but the circular shape allows to fit the actual geometry of VLSI contacts.
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